KLA Tencor 6220 Automatic Surface Inspection System Sold
Asset # :
54821
Equipment Make:
KLA-Tencor
Equipment Model:
6220
Type:
Automatic Surface Inspection System
Wafer Size:
2", 3", 4", 6" and 8"
Equipment Configuration:
– Thickness: SEMI Standard Wafer Thickness
– Material: Any Opaque, Polished Surface which Scatters less than 5 percent of Incident Light
– Defect Sensitivity: 0.09 Micrometer Diameter PSL Sphere Equivalent with greater than 80 percent Capture Rate (0.112u
Equipment Pictures:
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Added: October 9, 2020
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Views: 486