KLA Tencor RS 75 Resistivity Mapping System

Asset # : 54820

Equipment Make: KLA-Tencor

Equipment Model: RS 75

Type: Resistivity Mapping System

Wafer Size: 2" - 8"

Equipment Configuration:

– Software: StatTrax ST-6.71
– Handler: Desktop, without wafer transfer handler
– Pentium PRO 150 MHz computer
– 64 M DRAM
– 15 inch high-resolution LCD color monitor
– 200M fixed hard disk drive
– 3.5 inch diskette drive, 1.44 MB capacity
– Data Transfer

Equipment Pictures: