Nikon NSR FX 601 F Stepper Sold
Asset # :
54584
Equipment Make:
Nikon
Equipment Model:
NSR FX 601 F
Type:
Stepper
Wafer Size:
Equipment Configuration:
– Gen 2 (370 mm x 470 mm)
– Gen 3 (550 mm x 650 mm) LCD panels
– Resolution: < 2.4 um (isolated pattern), < um (L/S)
- Projection magnification 1: 1.25x
- Exposure field 120 mm square to 98.78 (H) x 138 (V) mm (< o169.71 mm)
- Reticle size: 6"
- Holds: ~(
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Added: October 9, 2020
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Views: 748