Alcatel AMS 4200 Advanced Multichamber ICP Deep Etcher Sold
Asset # :
54333
Equipment Make:
Alcatel
Equipment Model:
AMS 4200
Type:
Advanced Multichamber ICP Deep Etcher
Wafer Size:
6"
Equipment Configuration:
Process Chamber 1:
– Silicon Oxide (RGV Dielectric) Etch Process Module
– High pressure RIE source reactor
– Substrate Holder with mechanical clamping chuck for 150mm
– BIAS 600W LF
– Reactor Pump: Adixen RVP 2033C2 on DN40 throttle valve
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Added: October 9, 2020
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Views: 327