KLA Tencor FLX 2320 S Film Stress Measurement
Asset # :
53906
Equipment Make:
KLA-Tencor
Equipment Model:
FLX 2320 S
Type:
Film Stress Measurement
Wafer Size:
4", 5", 6"
Equipment Configuration:
– CE mark certified
– OS: Windows XP
– Software: Winflx 6.01
– GEM / SECS, HSMS, Serial interfaces
– CDA: 50 CFH 40 PSI
– Gas: Inert 5 CFH
Equipment Pictures:
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Added: October 9, 2020
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Views: 838