Lam TCP 9600 CFE Metal Etcher

Asset # : 53904
Equipment Make: Lam
Equipment Model: TCP 9600 CFE
Type: Metal Etcher
Wafer Size: 6"
Equipment Configuration:

– Software version: E1.5E2
– CE mark certified
– SECS interface
– 208 V, 3 phase
– Gas panel type: Standard / CES
– Standalone etcher mainframe type
– Microwave strip, DSQ, PLL
– Signal lamp power
– Remote operator interface
– Helium cooling MFC type: Advanced ESC
– Heated pumping manifolds
– On-board RF generators
– WVDS
– DSQ type: hinged
– Hine 38A indexers
– Endpoint detection system
– Endpoint type: Photodiode / Monochromators
– TCP coil size: 6″

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  • Added: October 9, 2020

  • Views: 414

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