Accretech / TSK UF 3000 Cool Temperature Range Wafer Prober

– X,Y Overall Accuracy：±2.0μm (Temp Stability ±1*C
– X,Y Stage Accuracy：±1.0μm
– Z Axis Stroke(Applicable stroke)：37mm
– Z Axis Control Accuracy：±2μm
– Stage Durability：200kgf
– Hot & Cold chuck
– Chiller：SCU-600
– Temp. Range：-40 to 150*C
– Right Side Lo