Accretech / TSK UF 3000 Hot Temperature Range Wafer Prober
Asset # :
53897
Equipment Make:
Accretech / TSK
Equipment Model:
UF 3000
Type:
Hot Temperature Range Wafer Prober
Wafer Size:
12"
Equipment Configuration:
– X,Y Overall Accuracy：±2.0μm (Temp Stability ±1*C)
– X,Y Stage Accuracy：±1.0μm
– Z Axis Stroke(Applicable stroke)：37mm
– Z Axis Control Accuracy：±2μm
– Stage Durability：200kgf
– Hot chuck
– Temp. Range：50 to 150*C
Equipment Pictures:
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Added: October 9, 2020
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Views: 153