Tel Alpha 303 i Vertical Anneal Furnace

Asset # : 53584

Equipment Make: Tel

Equipment Model: Alpha 303 i

Type: Vertical Anneal Furnace

Wafer Size: 12"

Equipment Configuration:

– Tube Material: Quartz
– Boat Material: SIC
– Production wafes: 50
– Process Gas: Ar (F.S:30slm), O2 (F.S:30slm), N2 (F.S:30slm), DCE (F.S:1slm)
– Water generating Type:External Torch
– MFC Maker: STEC
– MFC Model: Z 500 series
– Process Temp: 700~1100 C

Equipment Pictures: