Karl Suss M 6000 L Lift Off System

Asset # : 53014
Equipment Make: Karl Suss
Equipment Model: M 6000 L
Type: Lift Off System
Wafer Size: - Cassette to Cassette handling - Lift-Off Process Chamber (Module) - High Pressure dispense arm for dispensing recirculated NMP - Fan jet nozzle for dispensing fresh NMP - N2 backside rinse - Stainless Steel filters - Pneumatically controlled centering jaws - Drive via indirect AC servo motor - Send/Receive Module - System Robot - Rinse Module (DI water rinse wafers above and below) - DI Water rinse via puddle nozzle - 2-Tanks (1 for fresh, 1 for used NMP) - Chemical Delivery Cabinet - Power Supply - Emergency Off (EMO) - 2 Chillers
Equipment Configuration:

– Cassette to Cassette handling
– Lift-Off Process Chamber (Module)
– High Pressure dispense arm for dispensing recirculated NMP
– Fan jet nozzle for dispensing fresh NMP
– N2 backside rinse
– Stainless Steel filters
– Pneumatically controlled centering j
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  • Added: October 9, 2020

  • Views: 150

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