Tel Act 8 Track (Coater / Developer)

Asset # : 52622
Equipment Make: Tel
Equipment Model: Act 8
Type: Coater / Developer Track
Wafer Size: 8"
Equipment Configuration:

– Main controller: #2 Controller and touch panel exists
– CSB: 4 open cassettes, transfer arm
– Main Body #1: RRC pump in CSB, 3 COT spinners with 3 nozzles (2-1, 2-2: COT / 2-3 TCT)
– Main Body #2: Nozzle x1 for each DEV spinner
– Interface Block: WEE un
Equipment Pictures:
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  • Added: October 9, 2020

  • Views: 611

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