Tel Alpha 8 S LPCVD Furnace

– PolySi & Silicon nitride / Silicon dioxide
– Cassette to cassette operation 
– Thermal processing capabilities
– Gases:
– MFC 1: O2, 5 SLM
– MFC 2: N2, 20 SLM
– MFC 3: N2, 5 SLM
– MFC 4: ClF3, 5 SLM
– MFC 5: HCl, 500 SCCM
– MFC 6: SiH2Cl2, 200 SCCM
– MFC 7: House N2, 5 SLM
– MFC 8: Ar, 10 SLM
– MFC 9: SiH4, 200 SCCM
– MFC 10: SiH4, 2.0 SCCM
– MFC 11: NH3, 2 SLM
– MFC 13: H2, 10 SLM
– Includes:
– EBARA Turbo pump
– TS-4000Z Controller