Hitachi S 9380 II Scanning Electron Microscope (SEM)

Asset # : 51646
Equipment Make: Hitachi
Equipment Model: S 9380 II
Type: Scanning Electron Microscope (SEM)
Wafer Size: 12"
Equipment Configuration:

– Measurement type: Cursor & Line profile method
– Measurement Area: 0.05 – 2.0 μm
– Repeatability: 3σ≦2nm
– Throughput: 24 wafer/ h (1 point/chip, 20chip/wafer)
– Secondary electron resolving power: 2nm Acceleration Voltage: 0.8kV
– SEM image: 100
Equipment Pictures:
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  • Added: November 16, 2019

  • Views: 938

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