Asset # : 51523
Equipment Make: Applied Materials
Equipment Model: SEMVision G 3
Type: Defect Review System
Wafer Size:
Equipment Configuration:

– 2 Load portws with POUP capable (TDK)
– Loadports Carrier Reader: RFID type
– Brooks Robot
– SE-Gun Tip Light Source
– 10nm Resolution
– Optical Microscope
– Automatic Defect Review
– Automatic Defect Classification
– Site Inspection
– Automatic Defect Localization
– Beam Tilt
– Main Unit
– Operator Console
– UPS
– EPDU
– FFU
– Tool Cover
– Isolution Block

Equipment Pictures:

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Ad Details

  • Added: October 29, 2019

  • Views: 19

Description

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