Asset # : 51348
Equipment Make: Applied Materials
Equipment Model: P 5000 CVD
Type: Etcher
Wafer Size: 8"
Equipment Configuration:

– 1x Ch MxP Etch, 2x Ch WxZ CVD
– SBC Board Version: V 21
– Chamber Location : A/B/D
– Expanded VME – 20 Slots
– CRT Monitor
– Light Pen
– Hard disk
– Transformer: installed
– Mainframe Cover: removed
– Laminar Flow Hood: Installed
– Gas Panel: Expanded
– Robot Type: Phase 3 Type
– Robot Blade: 8″
– Storage Elv. Slots: 15
– AI/AO or AI/O boards: 4
– Stepper boards: 4 installed
– Di/Do or DI/D Boards: 5
– 5.35″ FDD

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  • Added: October 21, 2019

  • Views: 23

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