CHA Mark 50 Evaporator
Asset # :
50613
Equipment Make:
CHA
Equipment Model:
Mark 50
Type:
Evaporator
Wafer Size:
4", 6", 8"
Equipment Configuration:
– 6″ Planetary holders: 3 planetary holders at 8 x 6″ wafers for 24 wafers per load
– 8″ Planetary holders: 3 planetary holders at 5 x 8″ wafers for 15 wafers per load
– Used for straight forward backside metallization with Ti, Ni and Ag
– N2 process gas
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Added: October 9, 2020
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Views: 540