CHA Mark 50 Evaporator

Asset # : 50613
Equipment Make: CHA
Equipment Model: Mark 50
Type: Evaporator
Wafer Size: 4", 6", 8"
Equipment Configuration:

– 6″ Planetary holders: 3 planetary holders at 8 x 6″ wafers for 24 wafers per load
– 8″ Planetary holders: 3 planetary holders at 5 x 8″ wafers for 15 wafers per load
– Used for straight forward backside metallization with Ti, Ni and Ag
– N2 process gas

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  • Added: October 9, 2020

  • Views: 540

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