Perkin Elmer 4450 Pallet Sputter Tool
Asset # :
49636
Equipment Make:
Perkin Elmer
Equipment Model:
4450
Type:
Pallet Sputter Tool
Wafer Size:
Equipment Configuration:
3 x Delta Target (NiV,Ti,Ag) and Etch
– Issue with lock pressure switch which was causing vacuum leak.
-The system will not auto tune during RF etch but it can be manually tuned and it doesn’t drift once setup.
-The tool has three delta targets which ar
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Added: August 16, 2019
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Views: 165