Asset # : 48227
Equipment Make: KLA-Tencor
Equipment Model: Surfscan SP 1 DLS
Type:
Wafer Size: 12"
Equipment Configuration: - S/W version. MX 4.20.7199 SR05 - Software Application Options - Haze, Analysis & Normalization - Option, InMatch - XY Coordinates - Normal & Oblique Illumination - Hardware Configuration - PC "Intel Pentium III CPU 997MHz RAM:1.00GB" - Laser "Part Name:SSL Laser (Solid State Laser) - Source:Solid State Power: 75mW - Wavelength: 488nm" Load port - 300mm Dual FIMS Bulkhead Asyst - Two AdvanTag SingleWire CID Handler - Puck Handling - 300 mm - 21 ROBOT,ASYST Ethernet - E40/E94/E90 - E84 enabled for OHT & AGV/RGV E87 (Based on E39) - GEM/SECS and HSMS - NFS Client - Others 4 Color Light Tower
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  • Added: July 8, 2019

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