KLA Tencor Candela CS 2 Surface Analyzer 48087

Start-Up Report:
1. Check initial function, failed 
2. Check DTD, Com 3, test Ok
3. Check handler, com 6, test failed, no communication, found handler controller PLS status LED show red light 
4. Check stage/spindle controller, initial fail – reconnect connector, test OK
5. Disable handler, candela initial OK
6. Scantest, ok but not stable 
7. Handler, controller damage