Asset # : 47606
Equipment Make: KLA-Tencor
Equipment Model: P 15
Type: Surface Profiler
Wafer Size: 8"
Equipment Configuration:

– Scanning Distance: 80 mm
– Scanning Speeds: 1 um/s to 25 mm/s
– Measurement Range: 300 um maximum step
– Vibration Isolation Table Size: 830 mm x 1180 mm x 750 mm

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  • Added: June 5, 2019

  • Views: 50

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