Gasonics Aura A 1000 Photoresist Asher Sold
Asset # :
47387
Equipment Make:
Gasonics
Equipment Model:
Aura A 1000
Type:
Photoresist Asher
Wafer Size:
Equipment Configuration:
– Configuration: A 99 002 06
– MFCs and internal controller in place
– Internal throttle valve included
– External MKS throttle valve controller (152B) included
– No vacuum pump
– RF enable glitch
Equipment Pictures:
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Added: October 9, 2020
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Views: 701