Asset # : 47387
Equipment Make: Gasonics
Equipment Model: Aura A 1000
Type: Photoresist Asher
Wafer Size:
Equipment Configuration:

– Configuration: A 99 002 06
– MFCs and internal controller in place
– Internal throttle valve included
– External MKS throttle valve controller (152B) included
– No vacuum pump
– RF enable glitch

Equipment Pictures:

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  • Added: June 5, 2019

  • Views: 100

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