Asset # : 47106
Equipment Make: Lam
Equipment Model: Rainbow 4428 XL
Type: Poly Nitride Etcher
Wafer Size: 8"
Equipment Configuration:

– Software Version: E1.5-released
– CIM
– Main Mini Environment Platform
– Main CPU & ACDC Module
– (QTY: 2) Built-in Asyst 2200 Indexers
– Wafer Notch Alignment with Spatula
– (QTY: 2) Harmonic Drive with Wafer Handler
– Gap System
– RF Generator 1250W
Gasses:
– 500 sccm CL2 MRC
– 300 sccm HBR MRC
– 20 sccm O2 MRC
– 500 sccm HE MRC
– 300 sccm C2F6 MRC
– 200 sccm SF6 MRC
– 200 sccm CF4 MRC
– 50 sccm CHF3 MRC

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  • Added: April 29, 2019

  • Views: 64

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