Applied Materials Raider GT Copper (Cu) Plating Sold
Asset # :
46727
Equipment Make:
Applied Materials
Equipment Model:
Raider GT
Type:
Copper (Cu) Plating
Wafer Size:
8"
Equipment Configuration:
– Single-wafer
– Automated electrochemical deposition
– 4 TSV chambers
– Pre-wet vacuum chamber
– 2 SRD chambers
– Copper edge bid removal chamber
– 2 basic plating chambers
– Multi-zone anode array
– Incorporated RTA (real-time analytical) system
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Added: October 9, 2020
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Views: 199