Nikon NSR 2205 i 11 D Stepper

– Panel: MPXIII
– Chamber set temperature: Chamber / LLTC / IATC: 23°C
– AGILENT / HP / KEYSIGHT Laser: 5517B
– LSA Laser: 7 mw
– ITV Camera: NIKON Original
– OF Detection type: NIKON Original
– No in-line
– Wafer type: Flat
– Wafer loader type: Type 2
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