Nikon NSR 2205 i 11 D Stepper
Asset # :
46228
Equipment Make:
Nikon
Equipment Model:
NSR 2205 i 11 D
Type:
Stepper
Wafer Size:
4"
Equipment Configuration:
– Chamber model: N2A
– Panel: MPXIII
– Chamber set temperature: Chamber / LLTC / IATC: 23°C
– AGILENT / HP / KEYSIGHT Laser: 5517B
– LSA Laser: 7.2 mw
– ITV Camera: NIKON Original (Broken)
– OF Detection type: NIKON Original / OMRON
– No in-line
– Wafer
Equipment Pictures:
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Added: May 21, 2019
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Views: 396