Asset # : 46214
Equipment Make: Nikon
Equipment Model: NSR 2205 i 11 D
Type: Stepper
Wafer Size: 4"
Equipment Configuration:

– Chamber model: N2A
– Panel: MPXIII
– Chamber set temperature: Chamber / LLTC / IATC: 23°C
– AGILENT / HP / KEYSIGHT Laser: 5517B
– LSA Laser: 14.3 mw
– ITV Camera: NIKON Original
– OF Detection type: OMRON
– No in-line
– Wafer type: Flat
– Wafer loader type: Type 2
– Wafer condition: SAPPHIRE
– Wafer carrier table: Right
– FIA
– Reticle size, 6″
– Reticle library slot: 13 Slots
– No barcode & PPD
– Computer type: VAX 4000 90A
– CDA / Vacuum pipe
– WL/RL Belt
– Fiducial mark
– Control rack PCB
– STG Guide
– No SHRINC lens wheel belt. 

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  • Added: May 21, 2019

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