Nikon NSR 2205 i 11 D Stepper

– Chamber model: N2A
– Panel: MPXIII
– Chamber set temperature: Chamber / LLTC / IATC: 23°C
– AGILENT / HP / KEYSIGHT Laser: 5517B
– LSA Laser: 14.3 mw
– ITV Camera: NIKON Original
– OF Detection type: OMRON
– No in-line
– Wafer type: Flat
– Wafer loader