KLA Tencor 5200 XP–Sold
Asset # :
46009
Equipment Make:
KLA-Tencor
Equipment Model:
5200 XP
Type:
Wafer Size:
Equipment Configuration:
– 8″/200mm and 6” 150mm
Wafer Configuration- Fully Automated Non-Contact Box-In-Box Measurement (Stepper Alignment)
– GEM / SECS: 5.3.26
– Indexer: type 2, port open
– Console VAX/XP
– Blower Box
– Reflective Host Chuck
–
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Added: May 21, 2019
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Views: 659