Varian 3180 Sputter
Asset # :
45645
Equipment Make:
Varian
Equipment Model:
3180
Type:
Sputter
Wafer Size:
Equipment Configuration:
– Configured for 125mm wafers
– Four target stations;
One RF etch and three metal
– Ideal for high throughput, 24/7 operation.
– Mini quantum sources
– Cryopump for main chamber
– Turbo pump for load lock
– Large selection of hardware
– N
Equipment Pictures:
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Added: March 15, 2019
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Views: 387