Asset # : 45327
Equipment Make: Tel
Equipment Model: ACT 8
Type:
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Equipment Configuration: - 2Block /3COT(2COT, 1TCT), 3DEV - Main Controller ver : MISSING - System Power Rating : AC 208V, 3-Phase for System - Coater Unit (2-1, 2-2 Module) - TCT Unit (2-3 Module) - Developer Unit (3-1, 3-3, 3-4 Module) - Chemical Cabinet : Coater 1ea, Developer 1ea - Temp Control Unit (TCU) : SMC THERMO-CON 1EA - Temp & Humidity Controller : Komatsu SPA-1821-A 2ea, SPA-1822-i 1EA
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  • Added: February 21, 2019

  • Views: 10

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