Tel ACT 8 Track System
Asset # :
45327
Equipment Make:
Tel
Equipment Model:
Act 8
Type:
Track System
Wafer Size:
8"
Equipment Configuration:
– 2Block /3x Coat(2COT, 1TCT), 3x Develop
– Main Controller ver : MISSING
– System Power Rating : AC 208V, 3-Phase for System
– Coater Unit (2-1, 2-2 Module)
– TCT Unit (2-3 Module)
– Developer Unit (3-1, 3-3, 3-4 Module)
– Chemical Cabinet : Coater 1ea,
Equipment Pictures:
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Added: May 21, 2019
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Views: 319