Sharon–E Beam Evaporator
Asset # :
45288
Equipment Make:
Sharon
Equipment Model:
Type:
E-Beam Evaporator
Wafer Size:
Equipment Configuration:
– 17″ Diameter Chamber
– Capable of (4) 6″ wafers or (2) 8″ wafers
– 4 Pocket E-Beam Gun
– Temescal E-Beam Power Supply
– CTI 8 CyroPump
– Leybold D 90 A Vacuum Pump
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Added: February 21, 2019
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Views: 81