Canon PLA 501 FA Mask Aligner Sold
Asset # :
44747
Equipment Make:
Canon
Equipment Model:
PLA 501 FA
Type:
Mask Aligner
Wafer Size:
5"
Equipment Configuration:
– 220 V main power supply, single-phase, 3 lines, 1.6 A
– 110 V lamp power supply, single-phase, 3 lines, 5.5 A
– 250 W mercury lamp
– N2 gas (3.5 kg / cm2, 10 LPM)
– N2 gas (3.5 kg / cm2, 10 LPM)
– Vacuum (45 CHg)
Equipment Pictures:
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Added: July 31, 2019
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Views: 438