Asset # : 44747
Equipment Make: Canon
Equipment Model: PLA 501 F
Type: Mask Aligner
Wafer Size: 5"
Equipment Configuration:

– 220 V main power supply, single-phase, 3 lines, 1.6 A
– 110 V lamp power supply, single-phase, 3 lines, 5.5 A
– 250 W mercury lamp
– N2 gas (3.5 kg / cm2, 10 LPM)
– N2 gas (3.5 kg / cm2, 10 LPM)
– Vacuum (45 CHg)

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  • Added: February 5, 2019

  • Views: 60

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