Asset # : 43973
Equipment Make: Axcelis / Fusion
Equipment Model: 200 MCU
Type: Stripper Asher
Wafer Size:
Equipment Configuration:

– 8″
– ELO Display
– (2) 202 MCU Chambers
– (2) BOC EDWARDS Dry vacuum pumps
– Power supply: 208 V, 60 Hz, 3 Phase

Equipment Pictures:

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  • Added: January 25, 2019

  • Views: 39

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