Asset # : 42679
Equipment Make: Karl Suss / Fairchild Technologies
Equipment Model: PR 800
Type: DV Track
Wafer Size: 8"
Equipment Configuration:

– With 8 Hp, 3 Cp, 4 Transfer Cp
– 8 Transfer Stations
– 1 Hmds Prime
– 2 Spin Coat with 3 Chemical – Dispense Each
– 2 Develop Module with 2 Chemical Dispense
– 1 Oebr
– 52-Wafer Buffer Station, Interface
– 4 Ort I/O
– Chem. Cabinate
– Class 1 Enclosure with Ecu Unit and – Chemical Filtration

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  • Added: December 17, 2018

  • Views: 34

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