Karl Suss / Fairchild Technologies PR 800 DV Track

– With 8 Hp, 3 Cp, 4 Transfer Cp
– 8 Transfer Stations
– 1 Hmds Prime
– 2 Spin Coat with 3 Chemical – Dispense Each
– 2 Develop Module with 2 Chemical Dispense
– 1 Oebr
– 52-Wafer Buffer Station, Interface
– 4 Ort I/O
– Chem. Cabinate
– Class 1 Enclosure