Hitachi SU 70–
Asset # :
41959
Equipment Make:
Hitachi
Equipment Model:
SU 70
Type:
Wafer Size:
Equipment Configuration:
Process Type: FA SEMs/TEMs/Dual Beams
– Resolution Imaging; 1 nm/15 kV, 1.6 nm/1 kV
– In-lens SE and BSE Signal Filtering and Mixing Mode
– Maximum Probe Current of 100 nA or Greater Available with the Schottky Electron Source for optional EDX, WDS,
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Added: December 4, 2018
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Views: 120