FEI Quanta 200 3D Dual Beam SEM/FIB System Sold

Asset # : 41918
Equipment Make: FEI
Equipment Model: Quanta 200
Type: 3D Dual Beam SEM/FIB System
Wafer Size:
Equipment Configuration:

– There are 3 GIS; tungsten, Platinum and carbon
– tungsten source for the SEM
– Gallium source for the ion beam
– has a Kleindeck nanomanipulor, a cold stage several low vacuum and environmental vacuum detectors, a microfluid injection kit to examine moist samples and an EDX spectrometer- Known Issues: EDX is not in working order, probably simply the atmospheric thin window needs replaced.
The system does not go to high vacuum, issue with either the turbopump or the high vacuum gauge
One of the scroll pump for roughing may need replaced.

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  • Added: December 17, 2018

  • Views: 19

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