FEI Helios 460 HP Dual Beam Sold

Asset # : 41853
Equipment Make: FEI
Equipment Model: Helios 460 HP
Type: Dual Beam
Wafer Size:
Equipment Configuration:

• Workstation with Windows 7
• xT software version 5.5
• Support PC with Windows 7
• 2 x 24’’ widescreen LCD monitor
• Manual user interface
• Elstar electron column
• Beam Deceleration Mode
• In-lens detector TLD – with SE and BSED modes
• Secondary electron detector (SED)
• ICE detector
• In-column Detectors: ICD and Mirror detector
• Tomahawk ion column
• Beam current measurement
• MultiChem Gas Delivery System
• Platinum Deposition Precursor for MultiChem
• Insulator Deposition Precursor for MultiChem
• MultiChem Installation Tool
• Chamber
• Loadlock
• 100 x 100 mm eucentric stage
• FEI EasyLift EX NanoManipulator
• In-chamber Nav-Cam
• Integrated plasma cleaner
• IService Crane SDB
• Vaccum
• TMP
• Oil-free pumping system
• Cooling Unit (Air) 50/60Hz
• System Covers for Helios NanoLab

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  • Added: December 4, 2018

  • Views: 200

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