Mill Lane–Optical Coater

Asset # : 41510
Equipment Make: Mill Lane
Equipment Model:
Type: Optical Coater
Wafer Size:
Equipment Configuration:

– 21″ Diameter Planets, Convertible (4)
– 24″ Diameter Planets (3)
– Temescal EB Gun, 4 Pockets, 25cc
– CV-8 Power Supply
– MKS 224A Pressure Controller
– XY Programmable Sweep Control
– Granville Phillips 307 Vacuum Gauge Controller
– Inficon XTC/2 Deposition Controller
– DYN-Optics 590 Optical Monitor with Chip Changer
– HP Strip Chart Recorder
– Thermal Evaporation Power Supply and Controller
– Heat and Rotation Controllers
– Stokes 212-11 Mechanical Pump with Blower
– Helex 10″ Cryo Pump
– CVI 20″ Cryo Pump with Buck Boost Transformer for 440V Operation
– RGA SRS 100
– Spare Cold Heads for Both Pumps
– Large Assortment of Coating Fixtures

Equipment Pictures:

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  • Added: December 17, 2018

  • Views: 25

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