Karl Suss ACS 200 Coater
Asset # :
41054
Equipment Make:
Karl Suss
Equipment Model:
ACS 200
Type:
Coater
Wafer Size:
4"-8"
Equipment Configuration:
– 3x Coater
– 6 Hotplates
– 3 Coolplates
– GB4 Robot
– Media Cabinet
– F1 Pump
– Membrane Pump
– Prewet:
– BSR (Back Side Rinse)
– EBR (Wafer Edge Rinse)
– Missing Robot Handler & Chiller
Equipment Pictures:
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Added: October 11, 2018
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Views: 336