Asset # : 40622
Equipment Make: Karl Suss
Equipment Model: ACS 200
Type: Coater and Developer
Wafer Size: 8"
Equipment Configuration:

Karl Suss ACS 200 Coater and Developer, 8″
– Genmark GB-8 robot with end effectors
– Robot cassette scanner
– Auto-sizing cassette holder
– Manual-sizing cassette holder
– Universal centering station
– Optical pre-aligner
– Cyrset RC8 spin coater
– Spent chemical monitoring scale
– Vulcan dispense pump
– Virgin dispense pump
– Millpore wafergard Gen 2 + pump
– Millpore wafergard chemical dispense system
– Timed pump
– Aqueous based developer module
– HCV module
– Hop plate chamber
– Cold plate chamber
– Vapor prime chamber
– Filler Module

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  • Added: October 11, 2018

  • Views: 49

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