Asset # : 40622
Equipment Make: Karl Suss
Equipment Model: ACS 200
Type: Coater and Developer
Wafer Size: 8"
Equipment Configuration: Karl Suss ACS 200 Coater and Developer, 8" - Genmark GB-8 robot with end effectors - Robot cassette scanner - Auto-sizing cassette holder - Manual-sizing cassette holder - Universal centering station - Optical pre-aligner - Cyrset RC8 spin coater - Spent chemical monitoring scale - Vulcan dispense pump - Virgin dispense pump - Millpore wafergard Gen 2 + pump - Millpore wafergard chemical dispense system - Timed pump - Aqueous based developer module - HCV module - Hop plate chamber - Cold plate chamber - Vapor prime chamber - Filler Module
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  • Added: October 11, 2018

  • Views: 21

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