Asset # : 40265
Equipment Make: Axcelis / Fusion
Equipment Model: 200 PCU
Wafer Size: 6", 8"
Equipment Configuration: - Irradiator Contains Hg High Intensity Lamp and 2.45 GHz Magnetrons for UV Radiation Generation - Cassette-to-Cassette Operation - Microprocessor Controlled - Pneumatic Controlled Uplift for Irradiator - UV Port Housing - Operations Manual and Documentation
Added: September 18, 2018