Asset # : 40265
Equipment Make: Axcelis / Fusion
Equipment Model: 200 PCU
Type: Photostabilizer
Wafer Size: 6", 8"
Equipment Configuration:

– Irradiator Contains Hg High Intensity Lamp and 2.45 GHz Magnetrons for UV
Radiation Generation
– Cassette-to-Cassette Operation
– Microprocessor Controlled
– Pneumatic Controlled Uplift for Irradiator
– UV Port Housing
– Operations Manual and Documentation

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Ad Details

  • Added: September 18, 2018

  • Views: 136

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