Asset # : 40217
Equipment Make: Karl Suss
Equipment Model: MA 6 / BA 6
Type: Mask Aligner
Wafer Size: 6"
Equipment Configuration: - Topside (TSA) & Backside (BSA) Alignment - Suss DVM6 Splitfield Microscope - Objectives: 5x, 10x & 20x - UV 400 Optics (for 365nm and 405nm exposure) - CIC 500 Power Supply - Capable of Hard, Soft, Vacuum, and Proximity Contact - 350W Lamphouse - 230 V, 50/60 Hz
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  • Added: September 18, 2018

  • Views: 43

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