Asset # : 40217
Equipment Make: Karl Suss
Equipment Model: MA 6 / BA 6
Type: Mask Aligner
Wafer Size: 6"
Equipment Configuration:

– Topside (TSA) & Backside (BSA) Alignment
– Suss DVM6 Splitfield Microscope
– Objectives: 5x, 10x & 20x
– UV 400 Optics (for 365nm and 405nm exposure)
– CIC 500 Power Supply
– Capable of Hard, Soft, Vacuum, and Proximity Contact
– 350W Lamphouse
– 230 V, 50/60 Hz

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  • Added: September 18, 2018

  • Views: 63

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