Asset # : 39338
Equipment Make: Varian
Equipment Model: E 500 HP
Type: Implanter
Wafer Size:
Equipment Configuration: Compressor: CTI 8500 Target Cryo Pump: CT 250 F Source Dry Pump: Edward : QDP 80 Beamline Booster Pump: Edward : QMB 250 L/L Rough Pump: Edward : QDP 80 Stage 1, 2 Pump: Edward : QDP 80 + QMB 250 L/L Cryo Pump: CT 4 F Tilter Head: Belt Type Option: 2 Step Reducer Scrubber: Vector Technology, Process Gas: BF3, PH3, AsH3 3phase/5wire , 208V, 75KVA

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  • Added: August 14, 2018

  • Views: 95

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