Asset # : 39338
Equipment Make: Varian
Equipment Model: E 500 HP
Type: Implanter
Wafer Size:
Equipment Configuration:

Compressor: CTI 8500
Target Cryo Pump: CT 250 F
Source Dry Pump: Edward : QDP 80
Beamline Booster Pump: Edward : QMB 250
L/L Rough Pump: Edward : QDP 80
Stage 1, 2 Pump: Edward : QDP 80 + QMB 250
L/L Cryo Pump: CT 4 F
Tilter Head: Belt Type
Option: 2 Step Reducer
Scrubber: Vector Technology, Process Gas: BF3, PH3, AsH3
3phase/5wire , 208V, 75KVA

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  • Added: August 14, 2018

  • Views: 131

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