Axcelis / Eaton NV 6200 A Medium Current Implanter
Asset # :
39285
Equipment Make:
Axcelis / Eaton Nova
Equipment Model:
NV 6200 A
Type:
Medium Current Implanter
Wafer Size:
Equipment Configuration:
Compressor: Cti- Cryogenic 8500
Cryo pump: Cryo-torr 8 cryopump
Dry pump 1: Edwards QDP 80
Dry pump 2: Edwards QDP 40 + QMB 250
Dry pump controller: Edwards 3phase, 200-208V, 50/60Hz, 6.6kva
Scrubber: Vector Technology, Process Gases: BF3, PH3, AsH3
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Added: August 14, 2018
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Views: 655