Asset # : 39285
Equipment Make: Axcelis / Eaton
Equipment Model: NV 6200 A
Type: Medium Current Implanter
Wafer Size:
Equipment Configuration: Compressor: Cti- Cryogenic 8500 Cryo pump: Cryo-torr 8 cryopump Dry pump 1: Edwards QDP 80 Dry pump 2: Edwards QDP 40 + QMB 250 Dry pump controller: Edwards 3phase, 200-208V, 50/60Hz, 6.6kva Scrubber: Vector Technology, Process Gases: BF3, PH3, AsH3

Download Equipment PDF:

Send BTG Message:

Inquire

Ad Details

  • Added: August 14, 2018

  • Views: 54

Description

Tags :