Asset # : 39285
Equipment Make: Axcelis / Eaton
Equipment Model: NV 6200 A
Type: Medium Current Implanter
Wafer Size:
Equipment Configuration:

Compressor: Cti- Cryogenic 8500
Cryo pump: Cryo-torr 8 cryopump
Dry pump 1: Edwards QDP 80
Dry pump 2: Edwards QDP 40 + QMB 250
Dry pump controller: Edwards 3phase, 200-208V, 50/60Hz, 6.6kva
Scrubber: Vector Technology, Process Gases: BF3, PH3, AsH3

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  • Added: August 14, 2018

  • Views: 85

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