Asset # : 39219
Equipment Make: Axcelis / Fusion
Equipment Model: 202 MCU
Type: Maximum Integrated Plasma Asher
Wafer Size: 8"
Equipment Configuration:

– (2) Chambers 202 MCU
– (2) BOC Edwards Dry Vacuum Pumps 

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  • Added: August 14, 2018

  • Views: 107

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