Axcelis / Eaton Nova NV 6200 Ion Implanter

Asset # : 37620
Equipment Make: Axcelis / Eaton Nova
Equipment Model: NV 6200
Type: Ion Implanter
Wafer Size: 5", 6"
Equipment Configuration:

– Process Control: DataTrak
– Autotune: Manual

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  • Added: June 14, 2018

  • Views: 392

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