Asset # : 37619
Equipment Make: Axcelis / Eaton Nova
Equipment Model: NV 6200 / NV 6200 AV
Type: Ion Implanter
Wafer Size: 4"
Equipment Configuration:

– Process Control: DataTrak
– Autotune: Manual

Equipment Pictures:

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  • Added: June 14, 2018

  • Views: 366

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