Asset # : 36172
Equipment Make: Nanometrics
Equipment Model: 6100
Type:
Wafer Size:
Equipment Configuration:

Settings:
– Continuous scanning from 210-800 nanometres
– UV capabilities for measuring films of size 25A-500A
– Windows 95tm based GUI
– Database storage of measurements
– Real-time sample and model interferogram plotting
– Automated focusing
– Joystick-automated stage
– 32-bit Pentium microprocessor
– Measurement range: 25-200,000 A
– Tungsten halogen lamp for vertival reflected illumination
– Lenses: 4x, 10x, 40x
– Can accommodate 100mm/150mm or 150mm/200mm wafers
Attachments:
– 2D and 3D wafer-mapping software
– Computer monitor
– Keyboard
– Trackball
– Joystick

Equipment Pictures:

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Ad Details

  • Added: May 11, 2018

  • Views: 185

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