Asset # : 36172
Equipment Make: Nanometrics
Equipment Model: 6100
Type:
Wafer Size:
Equipment Configuration: Settings: - Continuous scanning from 210-800 nanometres - UV capabilities for measuring films of size 25A-500A - Windows 95tm based GUI - Database storage of measurements - Real-time sample and model interferogram plotting - Automated focusing - Joystick-automated stage - 32-bit Pentium microprocessor - Measurement range: 25-200,000 A - Tungsten halogen lamp for vertival reflected illumination - Lenses: 4x, 10x, 40x - Can accommodate 100mm/150mm or 150mm/200mm wafers Attachments: - 2D and 3D wafer-mapping software - Computer monitor - Keyboard - Trackball - Joystick
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  • Added: May 11, 2018

  • Views: 113

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