Asset # : 35877
Equipment Make: MRC
Equipment Model: Eclipse Star
Type:
Wafer Size:
Equipment Configuration:

MRC Eclipse Star
1- Is it set up for STD SEMI 6” single flat and thickness of 625 microns?-Yes
2- Is there the wafers holders with a Clamping ring?-Yes
3- Do they have Hard or soft Etch?-Hard
4- What Cathodes are installed in each three position? RMX 10 or SPA10”?-RMX10
5- What target are installed in each three position?-Ti/AL/TiN
6- What power is available for each cathodes? 10/20/30KW?-20KW/20KW/20KW (Eclipse 1)
7- Is the etch platform installed?-Yes
8- What Cryos are there installed? CTI F ? On board?-CTI 8F
9-  What Cryo compressors are there installed ? 9600 or 9700?-9600
10- What mechanical pumps are there? Dry or oil? Size? Model?-Edwards QDP40
11- Is the preprocess cassette installed in both?-Yes
12- Is the Secs II installed?-SECS
13- Is the tool still in clean room?-Yes
14- Are all manuals available?-Yes
15- Are there any spares or target available?-No

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  • Added: July 13, 2018

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