Asset # : 35877
Equipment Make: MRC
Equipment Model: Eclipse Star
Type:
Wafer Size:
Equipment Configuration: MRC Eclipse Star 1-            Is it set up for STD SEMI 6” single flat and thickness of 625 microns?-Yes 2-            Is there the wafers holders with a Clamping ring?-Yes 3-            Do they have Hard or soft Etch?-Hard 4-            What Cathodes are installed in each three position? RMX 10 or SPA10”?-RMX10 5-            What target are installed in each three position?-Ti/AL/TiN 6-            What power is available for each cathodes? 10/20/30KW?-20KW/20KW/20KW (Eclipse 1) 7-            Is the etch platform installed?-Yes 8-            What Cryos are there installed? CTI F ? On board?-CTI 8F 9-            What Cryo compressors are there installed ? 9600 or 9700?-9600 10-          What mechanical pumps are there? Dry or oil? Size? Model?-Edwards QDP40 11-          Is the preprocess cassette installed in both?-Yes 12-          Is the Secs II installed?-SECS 13-          Is the tool still in clean room?-Yes 14-          Are all manuals available?-Yes 15-          Are there any spares or target available?-No
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  • Added: July 13, 2018

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