Lam TCP 9608 SE Metal Etcher

– Software Version: E1.5
– SMIF System:
Asyst 2200 Indexer Built-In (Qty: 2)
– Handler System:
Wafer notch alignment with spatula
Harmonic drive with wafer handler (Qty: 2)
APM slider with shuttle arm
– Process Chms:
Etching with E-Chuck
Stripping
Rinse / Spin Dry
– Loadlock (Qty: 2)
– RF Generator 1250 W (Qty: 3)
– Manual WVDS Controller
– Remote AC Box