Lam TCP 9608 SE Metal Etcher

Asset # : 34338
Equipment Make: Lam
Equipment Model: TCP 9608 SE
Type: Metal Etcher
Wafer Size: 8"
Equipment Configuration:

– Software Version: E1.5
– SMIF System:
Asyst 2200 Indexer Built-In (Qty: 2)
– Handler System:
Wafer notch alignment with spatula
Harmonic drive with wafer handler (Qty: 2)
APM slider with shuttle arm
– Process Chms:
Etching with E-Chuck
Stripping
Rinse / Spin Dry
– Loadlock (Qty: 2)
– RF Generator 1250 W (Qty: 3)
– Manual WVDS Controller
– Remote AC Box

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Ad Details

  • Added: April 2, 2018

  • Views: 208

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