EVG 150 Automated Coater / Developer Processing System Sold

Asset # : 33745
Equipment Make: EVG
Equipment Model: 150
Type: Automated Coater / Developer Processing System
Wafer Size: 4" - 8"
Equipment Configuration:

– Windows
– Software release: EVG150 4,2,3,72
– 4 pumped lines. 4 IDI Cybor pumps, model 5026, with one pump controller (4 ports)
– 1 coater station with cup rinse cover and 1 develop station, 4 pumped lines of resist with balance. 3 pressurized  lines for promoter and develop chemistry with canister and balance. Automatic shutter on solvent exhaust (avoid having chemistry in the pipeline). Gentoolbox included for Genmark GB 7 P robot

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  • Added: March 20, 2018

  • Views: 48

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