EVG 150 Automated Coater / Developer Processing System Sold
Asset # :
33745
Equipment Make:
EVG
Equipment Model:
150
Type:
Automatic Coater / Developer
Wafer Size:
4" - 8"
Equipment Configuration:
– Windows
– Software release: EVG150 4,2,3,72
– 4 pumped lines. 4 IDI Cybor pumps, model 5026, with one pump controller (4 ports)
– 1 coater station with cup rinse cover and 1 develop station, 4 pumped lines of resist with balance. 3 pressurized lines
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Added: March 20, 2018
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Views: 360